Kontakt
Pfaffenwaldring 31
70569 Stuttgart
Deutschland
Ausgewählte Publikationen
- W. Petasch, E. Räuchle, M. Walker, „Polymer auf Aluminium: Partnerschaft auf kurze Zeit?“, Metalloberfläche, 46 (1992), 10, 457-461, ISSN: 0026-0797.
- W. Petasch, K. Baumgärtner, E. Räuchle, M. Walker, “Influence of plasma surface treatment on the adhesion of thin films on metals”, Surf. Coat. Technol., 59 (1993), 301, DOI: 10.1016/0257-8972(93)90101-S.
- W. Petasch, E. Räuchle, M. Walker, P. Elsner, “Improvement of the adhesion of low-energy polymers by a short-time plasma treatment”, Surface and Coatings Technology, 74-75 (1995), 682-688, DOI: 10.1016/0257-8972(94)08209-X.
- M. Walker, K. M. Baumgärtner, E. Räuchle, “Multilayer barrier films on polyethylene polymerized from CF 3H / C 2H 4 plasmas”, Acta Polym., 47 (1996), 466, DOI: 10.1002/actp.1996.010471008.
- M. Walker, K. M. Baumgärtner, M. Ruckh, M. Kaiser, H. W. Schock, E. Räuchle, “XPS and IR
Analysis of Thin Barrier Films Polymerized from C
2H
4 / CF
3H ECR-Plasmas”, J. Appl. Polym. Sci, 64 (1997), 717,
DOI: 10.1002/(SICI)1097-4628(19970425)64:4<717::AID-APP11>3.0.CO;2-R - M. Walker, K. M. Baumgärtner, M. Kaiser, S. Lindenmaier, E. Räuchle, “Barrier properties of thin films polymerized from CF 3H / C 2H 4 electron cyclotron resonance plasmas”, Surf. Coat. Technol., 97 (1997), 291, DOI: 10.1016/S0257-8972(97)00217-X.
- M. Kaiser, M. Walker, K. M. Baumgärtner, E. Räuchle, K. Kharitonov, M. Hauser, “Transparent and fluorescent plasma polymers from aromatic hydrocarbons”, Surf. Coat. Technol., 105 (1998), 165, DOI: 10.1016/S0257-8972(98)00480-0
- M. Walker, K. M. Baumgärtner, M. Kaiser, J. Kerres, A. Ullrich, E. Räuchle, “Proton-Conducting Polymers with Reduced Methanol Permeation”, J. Appl. Polym. Sci., 74 (1999), 67, DOI: 10.1002/(SICI)1097-4628(19991003)74:1<67::AID-APP7>3.0.CO;2-2.
- M. Kaiser, K. M. Baumgärtner, A. Schulz, M. Walker, E. Räuchle, “Linearly extended plasma source for large-scale applications”, Surf. Coat. Technol. 116-119 (1999), 552, DOI: 10.1016/S0257-8972(99)00283-2
- M. Walker, K. M. Baumgärtner, A. Schulz, E. Räuchle, “Silicon nitride films from the Plasmodul- a new microwave plasma device”, 14 th Int. Symp. on Plasma Chemistry, Symp. Proc., Vol. III (1999), 1427.
- M. Walker, K. M. Baumgärtner, J. Feichtinger, M. Kaiser, E. Räuchle, J. Kerres, „Barrier properties of plasma polymerized thin films“, Surf. Coat. Technol., 116-119 (1999), 996, DOI: 10.1016/S0257-8972(99)00216-9.
- M. Walker, K. M. Baumgärtner, J. Feichtinger, M. Kaiser, A. Schulz, E. Räuchle, „Silicon oxide films from the Plasmodul“, Vacuum, 57 (2000), 387, DOI: 10.1016/S0042-207X(00)00152-4.
- K. M. Baumgärtner, J. Schneider, A. Schulz, J. Feichtinger, M. Walker, “Short-time plasma pre-treatment of polytetraflurethylene for improved adhesion”, Surf. Coat. Technol. 142-144 (2001), 501, DOI: 10.1016/S0257-8972(01)01209-9.
- J. Feichtinger, R. Galm, M. Walker, K. M. Baumgärtner, A. Schulz, E. Räuchle, U. Schumacher, “ Plasma polymerized barrier films on membranes for direct methanol fuel cells”, Surf. Coat. Technol., 142-144 (2001), 181, DOI: 10.1016/S0257-8972(01)01070-2.
- M. Walker, S. Quell, J. Feichtinger, K. Hirsch, J. Schneider, A. Schulz, U. Schumacher, “ Spectroscopic investigations of a SiH 4 – NH 3 microwave plasma”, 15 th Int. Symp. on Plasma Chemistry, Symp. Proc., Vol. V (2001), 1853, https://www.ispc-conference.org/ispcdocs/ispc15/content/15/15-1853.pdf
- A. Schulz, K. M. Baumgärtner, J. Feichtinger, M. Walker, U. Schumacher, A. Eicke, K. Herz, F. Kessler, „Surface passivation of silicon with the Plasmodul“, Surf. Coat. Technol., 142-144 (2001), 771, DOI: 10.1016/S0257-8972(01)01180-X.
- J. Feichtinger, J. Kerres, A. Schulz, M. Walker, U. Schumacher, “Plasma modifications of membranes for PEM fuel cells”, J. New Mat. Electrochem. Systems, 5 (2002), ISSN: 1480-2422
- M. Walker, Plasma polymerized barrier films, Recent Res. Devel. Appl. Pol. Sci., 1 (2002), 281.
- J. Feichtinger, A. Schulz, M. Walker, U. Schumacher, “Sterilisation with low-pressure microwave plasmas”, Surf. Coat. Technol., 174-175 (2003), 564, DOI: 10.1016/S0257-8972(03)00404-3.
- A. Schulz, M. Walker, J. Feichtinger, E. Räuchle and U. Schumacher, “Investigations and applications of plasmas generated by the Duo-Plasmaline”, V th International Workshop, Microwave Discharges: Fundamentals and Applications”, Greifswald, Germany, ISBN 3-00-011612-5, 2003.
- J. Krüger, T. Kubach, J. Feichtinger, K. Hirsch, P. Lindner, S. Quell, A. Schulz, R. Stirn, M. Walker, U. Schumacher, “Spectroscopic investigations of pulsed microwave generated Ar, N 2 and silane plasmas”, Surf. Coat. Technol., 174-175 (2003), 933, DOI: 10.1016/S0257-8972(03)00446-8.
- M. Walker, J. Schneider, K. Bazzoun, J. Feichtinger, A. Schulz and U. Schumacher, “Barrier films on polymers from low-pressure microwave excited plasmas”, 16 th Int.Symp. on Plasma Chemistry, Symp. Proc., Vol. (2003), ISPC-675, https://www.ispc-conference.org/ispcdocs/ispc16/index.html.
- A. Schulz, J. Feichtinger, J. Krüger, M. Walker, U. Schumacher, “Spectroscopic investigations on silicon nitride deposition with the Plasmodul”, Surf. Coat. Technol., 174-175 (2003), 947, DOI: 10.1016/S0257-8972(03)00535-8.
- J. Schneider, J. Feichtinger, J. Krüger, P. Muranyi, A. Schulz, M. Walker, J. Wunderlich, U. Schumacher, „Sterilisation of food packaging materials by low-pressure microwave plasmas“, 16 th Int. Symp. on Plasma Chemistry, Symp. Proc., Vol. (2003), ISPC-657, https://www.ispc-conference.org/ispcdocs/ispc16/index.html.
- M. Walker, F. Meermann, J. Schneider, K. Bazzoun, J. Feichtinger, A. Schulz, J. Krüger and U. Schumacher, „Investigations of plasma polymerized films on polymeric materials“, Surf. Coat. Technol., 200 (2005), 947, DOI: 10.1016/j.surfcoat.2005.02.135.
- J. Krüger, U. Schweitzer, J. Schneider, A. Schulz, M. Walker, U. Schumacher, „Investigations of silicon nitride layers deposited in pulsed microwave generated ammonia-silane plasmas“, Surf. Coat. Technol., 200 (2005), 639, 2005 DOI: 10.1016/j.surfcoat.2005.01.112.
- A. Schulz, D. Herrmann, F. Kessler, J. Schneider, M. Walker, U. Schumacher, “Detection and identification of pinholes in plasma-polymerised thin film barrier coatings on metal foils”, Surf. Coat. Technol., 200 (2005), 213, DOI: 10.1016/j.surfcoat.2005.02.125.
- J. Schneider, K. M. Baumgärtner, J. Feichtinger, J. Krüger, P. Muranyi, A. Schulz, M. Walker,
J. Wunderlich, U. Schumacher, “Investigation of practicability of low-pressure microwave plasmas in
the sterilisation of food packaging materials at industrial level”, Surf. Coat. Technol., 200
(2005), 962,
DOI: 10.1016/j.surfcoat.2005.01.114. - J. Schneider, U. Schumacher, A. Schulz, M. Walker, M. Leins, U. Stroth, Development of Plasma Polymerised SiO x Barriers on Polymer Films for Food Packaging Applications, Plasma Process. Polym., 2007, 4, S155-S159, DOI: 10.1002/ppap.200730602.
- M Leins, M. Walker, K. M. Baumgärtner, A. Schulz, U. Schumacher, U. Stroth, “Studies on a microwave-heated atmospheric Plasma Torch”, Plasma Process. Polym., 2007, 4, S493-S497, DOI: 10.1002/ppap.200731213.
- A. Schulz, L. Steiner, M. Walker, U. Schweitzer, J. Krüger, U. Stroth, “Infrared and morphological investigations of plasma-polymerised thin silicon nitride films deposited with the Plasmodul”, Plasma Process. Polym., 2007, 4, S826-S830, DOI: 10.1002/ppap.200731914.
- U. Schweitzer, K. M. Baumgärtner, U. Stroth, M. Walker, U. Schumacher, A. Schulz, “Study of a new plasma source for free-standing plasmas”, Plasma Process. Polym., 2007, 4, S978-S981, DOI: 10.1002/ppap.200732311.
- U. Schweitzer, A. Schulz, M. Walker, K.-M. Baumgärtner, H. Muegge, U. Schumacher and U. Stroth, “The Microwave Concentrator Stack: A Source for Free-Standing, Linearly Extended Plasmas”, Contr. Plasma Phys., 47(7): 505-509, 2007, DOI: 10.1002/ctpp.200710065.
- M. Leins, L. Alberts M. Kaiser, M. Walker, A. Schulz, U. Schumacher, U. Stroth, “Development and characterisation of a microwave-heated atmospheric plasma torch”, Plasma Process. Polym. 2009, 6, S227-S232, DOI: 10.1002/ppap.200930604.
- M. Leins, A. Schulz, M. Walker, U. Schumacher, U. Stroth, “Development and Characterization of an Atmospheric-Pressure Microwave Plasma Torch”, IEEE Transaction on Plasma Science, 982 - 983, Vol. 36, No. 4, 2008, DOI: 10.1109/TPS.2008.924420.
- J. Schneider, M.-I. Akbar, J. Dutroncy, D. Kiesler, M. Leins, A. Schulz, M. Walker, U. Schumacher, and U. Stroth, “Silicon oxide barrier coatings deposited on polymer materials for applications in food packaging industry”, Plasma Process. Polym. 2009, 6, S700-S704, DOI: 10.1002/ppap.200931702.
- E. Häberle, J. Kopecki, A. Schulz, M. Walker, and U. Stroth, “Deposition of barrier layers for thin film solar cells sustained by bipolar substrate biasing”, Plasma Process. Polym. 2009, 6, S282-S286, DOI: 10.1002/ppap.200930613.
- E. Häberle, J. Kopecki, A. Schulz, M. Walker and U. Stroth, Influence of bipolar substrate bias on the layer growth and the composition of the deposited layer, 19 th Int. Symp. on Plasma Chemistry, ISPC-19, 2009, Bochum, https://www.ispc-conference.org/ispcproc/ispc19/papers/668.pdf
- M. Leins, M. Kaiser, A. Schulz, M. Walker, U. Schumacher and U. Stroth, “Characterization of an
atmospheric pressure microwave plasma torch for the abatement of halogenated VOC by means of
optical emission spectroscopy”, 19
th Int. Symp. on Plasma Chemistry, ISPC-19, 2009, Bochum,
https://www.ispc-conference.org/ispcproc/ispc19/papers/664.pdf - U. Schumacher, R. Stirn, A. B. Ene, K. Hirsch, M. Leins, P. Lindner, A. Schulz, and M. Walker, “ Spectroscopic Analysis of Microwave-Generated Plasmas”, IEEE Transaction on Plasma Science, 1836 - 1842, Vol. 37, No. 6, 2009, DOI: 10.1109/TPS.2009.2026278.
- G. Buyle, J. Schneider, M. Walker, Y. Akishev, A. Napartovich, M. Perucca, “Plasma Systems for Surface Treatment”, chapter 2, 33-61; J. Schneider, M. Walker, “Oxygen barriers for polymer food packaging”, chapter 8, 225–261. In Plasma Technology for Hyperfunctional Surfaces, edited by H. Rauscher, M. Perucca and G. Buyle, Wiley-VCH, Weinheim, 2010, ISBN: 978-3-527-32654-9.
- J. Kopecki, D. Kiesler, M. Leins, A. Schulz, M. Walker, M. Kaiser, H. Muegge, U. Stroth, “ Investigations of a high volume atmospheric plasma torch at 915 MHz”, Surface and Coatings Technology, 225, S342-S346, 2011, DOI: 10.1016/j.surfcoat.2011.04.031.
- S. Plog, J. Schneider, M. Walker, A. Schulz, U. Stroth, “Investigations of plasma polymerized SiOx barrier films for polymer food packaging”, Surface and Coatings Technology, 225, S165-S170, 2011, DOI: 10.1016/j.surfcoat.2011.01.034.
- A. Schulz, M. Leins, J. Kopecki, M. Walker, U. Stroth, „Mikrowellen-Plasmabrenner bei Atmosphärendruck“, Vakuum in Forschung und Praxis, 23, 6-11, 2011, DOI: 10.1002/vipr.201100475.
- S. Merli, A. Schulz, M. Walker, U. Stroth, T. Hirth, „Hochrateabscheidung mit einem Mikrowellenplasma“, Vakuum in Forschung und Praxis, 25(2), 33-44, 2013, DOI: 10.1002/vipr.201300513
- A. Schulz, P. Büchele, E. Ramisch, O. Janzen, F. Jimenez, C. Kamm, J. Kopecki, M. Leins, S. Merli, H. Petto, F.R. Mendez, J. Schneider, U. Schumacher, M. Walker, U. Stroth, „Scalable Microwave Plasma Sources From Low to Atmospheric Pressure“, Contrib. Plasma Phys., 52(7), 607-614, 2012, DOI: 10.1002/ctpp.201210057.
- M. Leins, M. Walker, A. Schulz, U. Schumacher, U. Stroth, “Spectroscopic investigation of a microwave-generated atmospheric pressure plasma torch”, Contrib. Plasma Phys., 52, 615-628, 2012, DOI: 10.1002/ctpp.201210058.
- M. Leins, J. Kopecki, W. Bongers, A. Goede, M. Graswinckel, A. Schulz, M. Walker, R. van de Sanden, T. Hirth, “CO 2-Dissociation by means of microwave plasma for midterm energy storage and solar fuel production”, Proceedings 31st ICPIG, Granada, Spain, 2013.
- S. Merli, A. Schulz, M. Walker, U. Stroth, T. Hirth, “High-rate deposition and scratch resistant coatings on polycarbonate with microwave PECVD”, Proc. 10 th ICCG, 2014.
- M. Leins, J. Kopecki, S. Gaiser, A. Schulz, M. Walker, U. Schumacher, U. Stroth, T. Hirth, “ Microwave Plasmas at Atmospheric Pressure”, Contrib. Plasma Phys., 54, No.1, 14-26, 2014, DOI: 10.1002/ctpp.201300033.
- A. Schulz, S. Merli, M. Walker, T. Hirth, “On the potential of large area PECVD”, Proc. 10 th ICCG, 2014.
- M. Leins, S. Gaiser, A. Schulz, M. Walker, U. Schumacher, T. Hirth, “How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters”, J. Vis. Exp., 98, 2015, DOI: 10.3791/52816.
- M. Leins, J. Kopecki, W. Bongers, A. Goede, M. Graswinckel, A. Schulz, M. Walker, T. Hirth, R. van de Sanden, “Dissociation of CO2 by means of a microwave plasma process for solar fuels production”, Proceedings of the ISPC 22, Antwerp, Belgium, 2015, https://www.ispc-conference.org/ispcproc/ispc22/P-II-8-18.pdf
- W.A. Bongers, S. Welzel, D.C.M. van den Bekerom, G. Frissen, G.J. van Rooij, A.P.H Goede, M. F Graswinckel, P.W. Groen, N. den Harder, B. van Heemert, T. Minea, and M.C.M. van de Sanden, M. Leins, J. Kopecki, A. Schulz and M. Walker, “Developments in CO 2 dissociation using non-equilibrium microwave plasma activation for solar fuels”, Proceedings of the ISPC 22, Antwerp, Belgium, 2015, https://www.ispc-conference.org/ispcproc/ispc22/O-15-4.pdf
- S. Gaiser, M. Leins, A. Schulz, M. Walker, T. Hirth, “Numerical Simulations of a Microwave Plasma Torch at Atmospheric Pressure”, Proceedings of the ISPC 22, Antwerp, Belgium, 2015, https://www.ispc-conference.org/ispcproc/ispc22/P-I-2-18.pdf
- W. Bongers, H. Bouwmeester, B. Wolf, F. Peeters, S. Welzel, D. van den Bekerom, N. den Harder, A. Goede, M. Graswinkel, P. W. Groen, J. Kopecki, M. Leins, G. van Rooij, A. Schulz, M. Walker, R. van de Sanden, “Plasma-driven dissociation of CO 2 for fuel synthesis”, Plasma Process Polym. 2017;14:e1600126, DOI: 10.1002/ppap. 201600126.
- S. Merli, A. Schulz, M. Walker, G. Tovar, „Hochrateabscheidung von Schutzbeschichtungen mit einem Mikrowellenplasma“, Galvanotechnik, 109(7), 1426-1433, 2018
- F. Buck, I. Kistner, C. Rösler, A. Schulz, M. Walker, G. Tovar, T. Schiestel, “Einsatz von perowskitischen Hohlfasermembranen in einem Mikrowellenplasma”, Chem. Ing. Techn. 2019, 91, No. 8, 1117-1122, DOI: 10.1002/cite.201900048.
- G. Chen, F. Buck, I. Kistner, M. Widenmeyer, T. Schiestel, A. Schulz, M. Walker, A. Weidenkaff, “A novel plasma-assisted hollow fiber membrane concept for efficiently separating oxygen from CO in a CO 2 plasma”, Chemical Engineering Journal 392 (2020), 123699, DOI: 10.1016/j.cej.2019.123699
- S. Hanke, C. Day, T. Giegerich, J. Igitkhanov, Y. Kathage, X. Luo, S. Varoutis, A. Vazquez Cortes, T. Härtl, A. Busniuk, A. Livshits, S. Merli, A. Schulz, M. Walker, K. Baumgärtner, J. Hofmann, “Progress of the R&D programme to develop a metal foil pump for DEMO”, Fusion Engineering and Design 161 (2020) 111890, DOI: 10.1016/j.fusengdes.2020.111890.
- K. Wiegers, A. Schulz, M. Walker, G. Tovar, “Determination of the Conversion and Efficiency for CO 2 in an Atmospheric Pressure Microwave Plasma Torch”, Chem. Ing. Techn. 2022, 94, No 3, 299-308, DOI: 10.1002/cite.202100149
- S. Pauly, A. Schulz, M. Walker, M. Gorath, K. Baumgärtner, G. Tovar, “Modeling and Experimental Study of a Remote Microwave Plasma Source for High-Rate Etching”, Chem. Ing. Techn. 2022, 94, No. 3, 410-416, DOI: 10.1002/cite.202100144
- K. Wiegers, A. Schulz, M. Walker, F. Buck, T. Schiestel, G. Tovar, „Enhancing CO2 Decomposition and Oxygen Removal via Ceramic hollow Fibers in a Microwave Plasma Torch”, Proceedings of the ISPC 25, Kyoto, Japan, 2023, https://www.ispc-conference.org/ispcproc/ispc25/pdf/2-P-209.pdf
- R. Antunes, K. Wiegers, A. Hecimovic, Ch. K. Kiefer, S. Buchberger, A. Meindl, T. Schiestel, A. Schulz, M. Walker, and U. Fantz, “Proof of Concept for O2 Removal with Multiple LCCF Membranes Accommodated in the Effluent of a CO 2 Plasma Torch”, ACS Sustainable Chem. Eng. 2023 ,11, 15984-15993, DOI: 10.1021/acssuschemeng.3c04862.
- Y. Kathage, A. Vazquez Cortes, S. Merli, C. Day, T. Giegerich, S. Hanke, J. Igitkhanov, A. Schulz, M. Walker, “Experimental Progress in the Development of a Metal Foil Pump for DEMO”, Plasma 2023, 6 (4), 714–734, DOI: 10.3390/plasma6040049.
Patente
- Oser,T. Kuhlmann, S. Merli, A. Schulz, M. Walker, “Multilayer structure with good UV and scratch protection“, European Patent EP 3 114 174 B1, (29.11.2017).
- J. Müller, A. Heindl, U. Stroth, M. Walker, A. Schulz, “Verfahren und Einrichtung zur Plasmaentkeimung von stückigen, fasrigen oder pulverförmigen Lebens- und Futtermitteln sowie pharmazeutischen Grundstoffen“, Offenlegungsschrift DE 10 2009 025 864.7, (14.10.2010)
- H. Muegge, K.-M. Baumgärtner, A. Schulz, U. Schweitzer, M. Walker, “Anordnung zur Konzentration von Mikrowellenenergie“, Offenlegungsschrift DE 10 2006 034 084 A1, (24.01.2008).
- M. Walker, E. Räuchle, H. Gleich, O. Hoyer, G. Vollweiler, “Process for plasma coating a plastic object with multifunctional layers“, European Patent EP 0 739 655 B1, (31.03.1999).
- M. Kaiser, M. Walker, E. Räuchle, M. Ruckh et al., “Mehrfunktions-Verkapselungsschichtstruktur für photovoltaische Halbleiterbauelemente und Verfahren zu ihrer Herstellung“, Offenlegungsschrift DE 197 32 217 A1, (11.02.1999).
Akademischer Werdegang
1983 bis 1989
Physikstudium an der Universität Stuttgart
1989 bis 1990
Diplomarbeit am Institut für Plasmaforschung mit dem Thema „Untersuchung der
plasmaphysikalischen Grundlagen einer induktiv gekoppelten Plasmaentladung“
11.09.1990
Diplomprüfung zum Dipl.-Phys.
1991 – 1996
Wissenschaftlicher Angestellter am Institut für Plasmaforschung
16.12.1996
Promotion zum Dr.-Ing. mit der Arbeit über die „Permeation von Toluol durch
plasmapolymerisierte Barriereschichten auf Polyethylen hoher Dichte“
Doktorvater Prof. Dr. Uwe Schumacher, Mitberichter Prof. Dr. Gerhard Busse
seit 01.01.2005
Leitung der Abteilung Plasmatechnologie des Instituts für Plasmaforschung
seit 01.01.2013
Leitung der Abteilung Plasmatechnologie des IGVP mit z.Zt. 2 Wissenschaftlern, 3 Doktoranden,
1 Techniker und 3 Bachelor- und Masterstudenten
Beruflicher Werdegang
1991 – 1996
Wissenschaftlicher Angestellter am Institut für Plasmaforschung
seit Juli 1999
Verwaltungsleiter des Instituts für Plasmaforschung
13.03.2000
Ernennung zum Akademischen Rat
17.06.2003
Ernennung zum Akademischen Oberrat
seit 01.01.2013
Verwaltungsleiter des Instituts für Grenzflächenverfahrenstechnik und Plasmatechnologie
(IGVP) mit mehr als 70 Mitarbeitern