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Planartron

The Planartron is similar to a Duo-Plasmaline array. Here the parallel quartz tubes are combined to a single quartz plate which separates the normal pressure region from the low pressure zone. The microwave travels as a free wave guided via a half coaxial wave guide which wiggles like a meander in the normal pressure region.
By the use of this structure the microwave is homogeneously fed through the quartz plate and forms a homogeneous plasma at the surface of the quartz plate in the low pressure zone.



 
Contact Person
Name: Dr.-Ing. Andreas Schulz