The Planartron resembles a duo-plasmaline array. Here, the parallel quartz tubes are combined into a single quartz plate that separates the normal pressure range from the plasma zone at low pressure. The microwave propagates as a free wave in a semi-coaxial waveguide with a meander structure.
When this structure is used, the microwave is guided homogeneously through the quartz plate and a homogeneous plasma is formed on the surface of the quartz plate in the low-pressure range.
Planartron reactor operating with different gases
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Andreas Schulz
Dr.-Ing.Research associate, Plasma Technology