Planartron

Duo-plasmaline array

The Planartron resembles a duo-plasmaline array. Here, the parallel quartz tubes are combined into a single quartz plate that separates the normal pressure range from the plasma zone at low pressure. The microwave propagates as a free wave in a semi-coaxial waveguide with a meander structure.

When this structure is used, the microwave is guided homogeneously through the quartz plate and a homogeneous plasma is formed on the surface of the quartz plate in the low-pressure range.

Planartron reactor operating with different gases

© Institute of Interfacial Process Engineering and Plasma Technology IGVP
Andreas Schulz
Dr.-Ing.

Andreas Schulz

Research associate, Plasma Technology

To the top of the page